Plasma processing apparatus

Assignee

• Samsung

Inventors

• Jun-Soo Lee (14 patents)
• Yoshihisa Hirano (24 patents)
• Jae Hoon Kim (359 patents)
• Young-Jin Noh (30 patents)
• Sung Moon Park (4 patents)
• Seung Kyu Lim (2 patents)
• Kyeong Seok Jeong (2 patents)
• Hyung Kyu Choi (10 patents)

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