Method for preparing MoF6 based on plasma activation of SF6

Assignee

• Hubei University Of Technology

Inventors

• Xiaoxing Zhang (33 patents)
• Yalong Li (9 patents)
• Zhaodi Yang (2 patents)
• Kun Wan (4 patents)
• Shuangshuang Tian (4 patents)
• Guozhi Zhang (3 patents)
• Yin Zhang (20 patents)
• Yunjian Wu (2 patents)
• Guoguang Zhang (15 patents)
• Guangke Li (2 patents)

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