Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Vaporizer, ion source and method for generating aluminum-containing vapor

Vaporizer, ion source and method for generating aluminum-containing vapor

US Patent 12112915 · Granted Oct 8, 2024

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Vaporizer, ion source and method for generating aluminum-containing vapor2025
Vaporizer, ion source and method for generating aluminum-containing vapor2025
Ion source2021
Ion source2021
Plasma generation system2018
Plasma generation system2018
Plasma generator with at least one non-metallic component2018
Beam current density distribution adjustment device and ion implanter2017
Ion beam line2016
Magnetic field sources for an ion source2016
Ion beam line2015
Ion source having at least one electron gun comprising a gas inlet and a plasma 2015