Composition for cobalt plating comprising additive for void-free submicron feature filling

Assignee

• Basf Se

Inventors

• Sathana Kitayaporn (3 patents)
• Charlotte Emnet (15 patents)
• Dieter Mayer (47 patents)
• Nadine ENGELHARDT (6 patents)
• Marco Arnold (20 patents)
• Lucas Benjamin HENDERSON (3 patents)
• Alexander FLUEGEL (14 patents)

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