Plasma treatment process to densify oxide layers

Assignee

• Applied Materials

Inventors

• Jung Chan Lee (18 patents)
• Mun Kyu Park (2 patents)
• Jun Seok Lee (117 patents)
• Euhngi Lee (3 patents)
• Kyu-Ha Shim (18 patents)
• Deven Matthew Raj Mittal (5 patents)
• Sungho Jo (7 patents)
• Timothy J. Miller (48 patents)
• Jingmei Liang (38 patents)
• Praket P. Jha (31 patents)
• Sanjay Kamath (18 patents)

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