Metal complexes for gas-phase thin-film deposition

Assignee

• Umicore Ag & Co. Kg

Inventors

• Joerg Sundermeyer (14 patents)
• Henrik SCHUMANN (2 patents)
• Wolf Schorn (10 patents)
• Nicholas RAU (4 patents)
• Annika Frey (16 patents)
• Ralf Karch (51 patents)
• Eileen Woerner (34 patents)
• Angelino Doppiu (38 patents)

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