Metal oxide film and semiconductor device

Assignee

• Semiconductor Energy Laboratory

Inventors

• Yasuharu HOSAKA (83 patents)
• Toshimitsu OBONAI (35 patents)
• Yukinori SHIMA (160 patents)
• Masami JINTYOU (168 patents)
• Daisuke Kurosaki (79 patents)
• Takashi Hamochi (64 patents)
• Junichi Koezuka (337 patents)
• Kenichi OKAZAKI (282 patents)
• Shunpei Yamazaki (6,629 patents)

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