Method for coating a substrate with tantalum nitride

Assignee

• Safran
• CNRS
• Université De Bordeaux

Inventors

• Marjorie Christine CAVARROC (4 patents)
• Baptiste Simon GIROIRE (3 patents)
• Lionel Teule-Gay (2 patents)
• Angélique Nadine Jeanne POULON (3 patents)

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