Substrate transfer robot for transferring substrate in vacuum chamber

Assignee

• T-Robotics Co.

Inventors

• Soo Jong Lee (17 patents)
• Myung Jin Kim (51 patents)
• Chang Seong Lee (6 patents)
• Seung Young Baek (4 patents)
• Chang Hyun Jee (9 patents)
• Sang Hwi Ham (6 patents)
• Moon Gi Hur (6 patents)
• Jae Hyun Park (390 patents)
• Tae Han Lee (7 patents)

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