MEMS device with tiltable structure and improved control

Assignee

• Stmicroelectron S.R.L.

Inventors

• Roberto Carminati (60 patents)
• Nicolo' BONI (15 patents)
• Andrea Barbieri (22 patents)
• Marco Zamprogno (43 patents)
• Luca Molinari (17 patents)

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