Multilayer magnetic tunnel junction etching method and MRAM device

Assignee

• Jiangsu Leuven Instruments Co.

Inventors

• Juebin Wang (3 patents)
• Zhongyuan Jiang (4 patents)
• Ziming Liu (5 patents)
• Dongchen CHE (4 patents)
• Hushan Cui (4 patents)
• Dongdong HU (14 patents)
• Lu-Zhuo Chen (33 patents)
• Dajian Han (2 patents)
• Zhiwen Zou (2 patents)
• Kaidong XU (18 patents)

View full patent text on Google Patents →