Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Progressive heating of components of substrate processing systems using TCR element-based heaters

Progressive heating of components of substrate processing systems using TCR element-based heaters

US Patent 12062554 · Granted Aug 13, 2024

Estimated economic value: $174,384,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Dual zone heaters for metallic pedestals2025
Rapid tuning of critical dimension non-uniformity by modulating temperature tran2025
Multilayer coatings of component parts for a work piece processing chamber2025
Concentration control using a bubbler2025
Concentration control using a bubbler2025
Temperature control of a multi-zone pedestal2025
Use of vacuum during transfer of substrates2025
Electrostatic chuck with seal surface2024
Pedestals for modulating film properties in atomic layer deposition (ALD) substr2024
Trim and deposition profile control with multi-zone heated substrate support for2024
Systems and methods for reducing effluent build-up in a pumping exhaust system2024
Substrate processing systems including gas delivery system with reduced dead leg2024