Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Optical thickness control during a chemical mechanical polishing process and apparatus for effecting the same

Optical thickness control during a chemical mechanical polishing process and apparatus for effecting the same

US Patent 12059769 · Granted Aug 13, 2024

Estimated economic value: $18,777,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Voltage monitoring system, voltage monitoring device and voltage monitoring meth2025
Device for conditioning chemical mechanical polishing2025
Chemical mechanical polishing apparatus and method2025
Chemical mechanical polishing apparatus and method2025
Chemical-mechanical polishing apparatus2024
Chemical-mechanical polishing apparatus2023
Chemical-mechanical planarization system2021
Conditioning wheel for polishing pads2021
Chemical mechanical polishing apparatus and method2020