Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate positioning device with remote temperature sensor

Substrate positioning device with remote temperature sensor

US Patent 12051607 · Granted Jul 30, 2024

Estimated economic value: $121,959,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus for obtaining optical measurements in a charged particle apparatus2025
Particle beam inspection apparatus2025
Particle beam inspection apparatus2025
Fluid transfer system in a charged particle system2025
Lithographic apparatus and device manufacturing method2024
Method, apparatus, and system for wafer grounding2024
Object table comprising an electrostatic clamp2024
Fluid transfer system in a charged particle system2024
Stage apparatus2024
Particle beam inspection apparatus2024
Particle beam inspection apparatus2024
Stage apparatus suitable for a particle beam apparatus2024