Transversely-excited film bulk acoustic resonator with multi-mark electrodes and optimized electrode thickness

Assignee

• Murata Manufacturing Co.

Inventors

• Greg Dyer (36 patents)
• Bryant Garcia (100 patents)
• Julius Koskela (47 patents)
• Robert B. Hammond (80 patents)
• Patrick Turner (134 patents)
• Viktor Plesski (90 patents)
• Ventsislav Yantchev (120 patents)
• Neal Fenzi (92 patents)

View full patent text on Google Patents →