Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate cleaning device and substrate cleaning method

Substrate cleaning device and substrate cleaning method

US Patent 11996303 · Granted May 28, 2024

Estimated economic value: $16,652,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Entity recognition method and apparatus, and computer program product2025
Data processing method2024
Monitoring method for chemical mechanical polishing and chemical mechanical poli2024
Cleaning liquid supply device, cleaning unit, and storage medium storing program2024
Substrate processing apparatus and method for removing substrate from table of s2024
Substrate processing apparatus and method for removing substrate from table of s2024
Substrate cleaning device and substrate cleaning method2024
Substrate cleaning device and substrate cleaning method2024
Adversarial multi-binary neural network for multi-class classification2024
Substrate processing device2024
Substrate processing device2024
Systems and methods for processing speech dialogues2024