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Home › Microelectromechanical systems (“MEMS”) device having a built-in self-test (“BIST”) and a method of application of a BIST to measure MEMS health

Microelectromechanical systems (“MEMS”) device having a built-in self-test (“BIST”) and a method of application of a BIST to measure MEMS health

US Patent 11975963 · Granted May 7, 2024

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