Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for manufacturing a silicon-based coriolis-force-based flow sensing device, coriolis-force-based flow sensing device, and system for measuring a property of a fluid

Method for manufacturing a silicon-based coriolis-force-based flow sensing device, coriolis-force-based flow sensing device, and system for measuring a property of a fluid

US Patent 11971284 · Granted Apr 30, 2024

Estimated economic value: $53,354,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Micromechanical device for enhanced acceleration measurement2025
Micromechanical device for enhanced acceleration measurement2025
Detection structure for a MEMS accelerometer having improved performances and ma2025
Detection structure for a MEMS accelerometer having improved performances and ma2025
Z-axis microelectromechanical sensor device with improved stress insensitivity2025
Z-axis microelectromechanical sensor device with improved stress insensitivity2025
PMUT array with presence of separate sensing small PZT on membranes edge2025
Packaged pressure sensor device and corresponding method for detecting the prese2025
MEMS gyroscope having quadrature compensation electrodes and method for compensa2025
Method for correcting gyroscope demodulation phase drift2025
Method for correcting gyroscope demodulation phase drift2025
Long stroke MEMS actuator resilient to the pull-in and electronic system includi2025