Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for producing a microelectromechanical sensor and microelectromechanical sensor

Method for producing a microelectromechanical sensor and microelectromechanical sensor

US Patent 11958740 · Granted Apr 16, 2024

Estimated economic value: $12,402,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for setting a pressure in a cavity formed with the aid of a substrate and2021