Dual-layer micro-ribbon MEMS light modulator

Assignee

• Silicon Light Machines

Inventors

• Olav Solgaard (84 patents)
• Stephen Hamann (8 patents)
• Alexander Payne (41 patents)
• Lars Eng (19 patents)
• James Hunter (42 patents)
• Tianbo Liu (8 patents)

View full patent text on Google Patents →