Simultaneous double-side coating of multilayer graphene pellicle by local thermal processing

Assignee

• Asml Netherlands B.V.

Inventors

• Evgenia KURGANOVA (11 patents)
• Adrianus Johannes Maria Giesbers (12 patents)
• Maxim Aleksandrovich Nasalevich (21 patents)
• Arnoud Willem Notenboom (25 patents)
• Mária Péter (28 patents)
• Pieter-Jan Van Zwol (30 patents)
• David Ferdinand Vles (26 patents)
• Willem-Pieter Voorthuijzen (16 patents)

View full patent text on Google Patents →