High speed synchronization of plasma source/bias power delivery

Assignee

• Mks Instruments

Inventors

• Aaron T. Radomski (42 patents)
• Benjamin J. Gitlin (3 patents)
• Larry J. Fisk, II (17 patents)
• Mariusz Oldziej (7 patents)
• Aaron Michael Burry (123 patents)
• Jonathan Smyka (14 patents)
• Alexei Marakhtanov (100 patents)
• Bing Ji (26 patents)
• Felix Kozakevich (58 patents)
• John Holland (130 patents)
• Ranadeep Bhowmick (17 patents)

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