Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Surface acoustic wave sensor assembly

Surface acoustic wave sensor assembly

US Patent 11920994 · Granted Mar 5, 2024

Estimated economic value: $73,319,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

In-chamber low-profile sensor assembly2025
MEMS resonator sensor substrate for plasma, temperature, stress, or deposition s2025
Optical spectrum sensor wafer or robot for chamber condition monitoring2024
Hoist and winch cable angle sensor2024
Microwave resonator array for plasma diagnostics2024
In-chamber low-profile sensor assembly2024
Surface acoustic wave sensor assembly2024
MEMS resonator sensor substrate for plasma, temperature, stress, or deposition s2024
In-situ optical chamber surface and process sensor2023
Optical wall and process sensor with plasma facing sensor2022
Micro resonator array sensor for detecting wafer processing parameters2022
Hoist and winch cable angle sensor2022