Assignee
- Semiconductor Manufacturing International (Shanghai)
- Semiconductor Manufacturing International (Beijing)
Inventors
- Hailong Yu (23 patents)
- Xuezhen JING (6 patents)
- Hao Zhang (482 patents)
- Tiantian Zhang (27 patents)
- Jinhui MENG (1 patents)
US Patent 11908906 · Granted Feb 20, 2024