Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Processing method for fluorination of fluorination-target component for semiconductor fabrication equipment, which minimizes generation of contaminant particles, and fluorinated component obtained thereby

Processing method for fluorination of fluorination-target component for semiconductor fabrication equipment, which minimizes generation of contaminant particles, and fluorinated component obtained thereby

US Patent 11898254 · Granted Feb 13, 2024

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Display device and display panel2025
Display panel includes a plurality of high-potential voltage lines and low-poten2025
Gate driving circuit and display device including gate driving circuit2025
Display device and display panel2025
Brush and comb device2025
Refrigerator2024
Analog-to-digital converting circuit for decreasing decision delay and operation2024
Semiconductor device and method of manufacturing the same2024
Semiconductor packages2024
Method of manufacturing a semiconductor device including bonding layer and adsor2023
Refrigerator2023
A/D converter including comparison circuit and image sensor including same2023