Method of forming vanadium nitride-containing layer

Assignee

• Asm Ip Holding B.V.

Inventors

• Pia Homm Jara (2 patents)
• Werner Knaepen (34 patents)
• Dieter Pierreux (47 patents)
• Bert Jongbloed (41 patents)
• Panagiota Arnou (2 patents)
• Ren-Jie Chang (9 patents)
• Qi Xie (92 patents)
• Unknown
• Gido Van Der Star (8 patents)

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