Holding member, irradiator, and plasma apparatus

Assignee

• Sekisui Chemical Co.

Inventors

• Tatsuya MATSUO (2 patents)
• Yoshishige Takikawa (4 patents)
• Yu Nagahara (6 patents)
• Naomichi Saito (3 patents)
• Masaki Iwasaki (5 patents)
• Takaya OSHITA (5 patents)

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