Complex spatially-resolved reflectometry/refractometry

Assignee

No assignee recorded.

Inventors

• Christina Porter (2 patents)
• Daniel E. Adams (10 patents)
• Michael Tanksalvala (3 patents)
• Elisabeth Shanblatt (2 patents)
• Margaret M. Murnane (14 patents)
• Henry C. Kapteyn (21 patents)

View full patent text on Google Patents →