Lithography mask with a black border regions and method of fabricating the same

Assignee

• TSMC

Inventors

• Chin-Hsiang Lin (351 patents)
• Chien-Cheng Chen (70 patents)
• Hsin-Chang Lee (159 patents)
• Chia-Jen Chen (90 patents)
• Pei-Cheng Hsu (79 patents)
• Yih-Chen Su (7 patents)
• Gaston Lee (3 patents)
• Tran-Hui Shen (19 patents)

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