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Home › System and method for using pulsed radio frequency (RF) signals and a modulated scattering probe (MSP) to enable measurements of distance to and planarity of a surface of a device under test (DUT)

System and method for using pulsed radio frequency (RF) signals and a modulated scattering probe (MSP) to enable measurements of distance to and planarity of a surface of a device under test (DUT)

US Patent 11835563 · Granted Dec 5, 2023

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