Edge protection on semiconductor substrates

Assignee

• Applied Materials

Inventors

• Amirhasan Nourbakhsh (10 patents)
• Lan Yu (73 patents)
• Joseph F. Salfelder (7 patents)
• Ki Cheol Ahn (4 patents)
• Tyler Sherwood (13 patents)
• Siddarth A. Krishnan (86 patents)
• Michael Jason Fronckowiak (1 patents)
• Unknown

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