Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Carrier ring designs for controlling deposition on wafer bevel/edge

Carrier ring designs for controlling deposition on wafer bevel/edge

US Patent 11830759 · Granted Nov 28, 2023

Estimated economic value: $227,123,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Dynamic sheath control with edge ring lift2025
Carrier ring designs for controlling deposition on wafer bevel/edge2025
Carrier ring designs for controlling deposition on wafer bevel/edge2025
Spatially tunable deposition to compensate within wafer differential bow2025
Use of vacuum during transfer of substrates2025
Remote-plasma clean (RPC) directional-flow device2024
Spatially tunable deposition to compensate within wafer differential bow2024
Carrier ring designs for controlling deposition on wafer bevel/edge2023
Carrier ring designs for controlling deposition on wafer bevel/edge2023
Remote-plasma clean (RPC) directional-flow device2023
Dynamic sheath control with edge ring lift2022
Linear motor for pumping2022