Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › MEMS sensor and method for manufacturing a MEMS sensor including improved time reliable reinforcement structure

MEMS sensor and method for manufacturing a MEMS sensor including improved time reliable reinforcement structure

US Patent 11828669 · Granted Nov 28, 2023

Estimated economic value: $12,889,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Micromechanical structure and micromechanical sensor2024
Micromechanical structure and micromechanical sensor2024
Micromechanical device including a stop spring structure2023
Micromechanical sensor device with integrated housing seal, micromechanical sens2021