Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

US Patent 11828585 · Granted Nov 28, 2023

Estimated economic value: $115,310,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Metrology method for measuring an etched trench and associated metrology apparat2025
Method and apparatus to determine a patterning process parameter2025
Metrology method, target and substrate2025
Metrology apparatus based on high harmonic generation and associated method2025
Method of determining a characteristic of a structure, and metrology apparatus2025
Metrology systems, coherence scrambler illumination sources and methods thereof2025
Metrology system and method for determining a characteristic of one or more stru2025
Illumination apparatus and associated metrology and lithographic apparatuses2025
Metrology tool with position control of projection system2025
Inspection method and apparatus, lithographic apparatus, lithographic processing2025
Inspection method and apparatus, lithographic apparatus, lithographic processing2025
Metrology method and apparatus and computer program2025