Back end of line (BEOL) process corner sensing

Assignee

• Qualcomm

Inventors

• Saravanan Marimuthu (4 patents)
• De Lu (11 patents)
• Baldeo Sharan Sharma (1 patents)
• Unknown
• Venkat Narayanan (21 patents)
• Rui Li (6 patents)
• Samy Shafik Tawfik Zaynoun (3 patents)
• Min-Hsian Chen (8 patents)
• David A. Kidd (32 patents)
• Amit Patil (1 patents)

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