Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Real-time control of temperature in a plasma chamber

Real-time control of temperature in a plasma chamber

US Patent 11823875 · Granted Nov 21, 2023

Estimated economic value: $115,339,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems and methods for a valve and a valve assembly2025
RF immune sensor probe for monitoring a temperature of an electrostatic chuck of2025
Identification of and compensation for a failure in a heater array2024
In situ real-time sensing and compensation of non-uniformities in substrate proc2024
Power and data transmission to substrate support in plasma chambers via optical 2024
Real-time control of temperature in a plasma chamber2021
Substrate processing system printed-circuit control board assembly with one or m2019