Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Electrostatic chuck apparatus and semiconductor manufacturing apparatus

Electrostatic chuck apparatus and semiconductor manufacturing apparatus

US Patent 11823872 · Granted Nov 21, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate processing apparatus and method of producing semiconductor device2025
Method for producing semiconductor device2024
Semiconductor manufacturing apparatus and manufacturing method of semiconductor 2024
Gas recovering apparatus, semiconductor manufacturing system, and gas recovering2023
Substrate processing apparatus and method of producing semiconductor device2022
Method for manufacturing semiconductor device having a film with layers of diffe2022
Manufacturing method of semiconductor device2022
Mask member and method for producing semiconductor device2021
Method of manufacturing semiconductor device2020
Variable resistance element and memory device2018
Method for manufacturing semiconductor device2017
Communication system and mobile communication device2016