Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for open-loop or closed-loop control of the temperature of a chuck for a wafer, temperature adjustment device, and wafer testing system

Method for open-loop or closed-loop control of the temperature of a chuck for a wafer, temperature adjustment device, and wafer testing system

US Patent 11821941 · Granted Nov 21, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Hybrid chuck2015
Process for producing cellulose fibres2000
Process for the treatment of cellulose fibres and of assemblies made from these 2000
Process for the production of cellulose fibres having a reduced tendency to fibr1998
Process for the production of cellulose fibres having a reduced tendency to fibr1997
Process for the production of cellulose moulded bodies1997
Internal combustion engine with an exhaust gas turbocharger1997
Process for the production of a cellulose moulded body1997
Process of making cellulose fibres1996