Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Target for optical measurement of trenches

Target for optical measurement of trenches

US Patent 11808715 · Granted Nov 7, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System and method for performing alignment and overlay measurement through an op2025
Plasma-enhanced deposition of film stacks2025
Multi-layer calibration for empirical overlay measurement2025
Effective cell approximation model for logic structures2024
Apparatus and method for multiple source excitation Raman spectroscopy2024
Opto-acoustic measurement of a transparent film stack2023
Opto-acoustic measurement of a transparent film stack2023
Vacuum-integrated hardmask processes and apparatus2021
Optical metrology device using numerical aperture reduction2021
Calibration of azimuth angle for optical metrology stage using grating-coupled s2021
Optical metrology system using infrared wavelengths2021
Metallic gratings and measurement methods thereof2021