System for precision displacement measurement based on self-traceable grating interference

Assignee

• Tongji University

Inventors

• Xiao DENG (3 patents)
• Xinbin CHENG (2 patents)
• Zichao Lin (1 patents)
• Zhenjie GU (1 patents)
• Yulin Yao (1 patents)
• Tongbao LI (1 patents)

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