Piezoelectric pump with an upper and lower vibrating body

Assignee

• Murata Manufacturing Co.

Inventors

• Daisuke Kondo (58 patents)
• Hiroaki Wada (45 patents)
• Nobuhira Tanaka (68 patents)
• Hiroyuki Yokoi (23 patents)
• Hiroki Achiwa (8 patents)
• Hiroshi Takemura (49 patents)

View full patent text on Google Patents →