Vacuum pump, scroll pump, and manufacturing method for such

Assignee

• Pfeiffer Vacuum

Inventors

• Michael Willig (5 patents)
• Jan Hofmann (9 patents)
• Jonas BECKER (4 patents)
• Gernot Bernhardt (1 patents)
• Verena WANGORSCH (1 patents)
• Stefan Kallenborn (1 patents)
• Wolfgang Soehngen (2 patents)
• Heiko Schaefer (6 patents)
• Erhard HARAPAT (1 patents)
• Lars PAULI (1 patents)

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