Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Tunable source of intense, narrowband, fully coherent, soft X-rays

Tunable source of intense, narrowband, fully coherent, soft X-rays

US Patent 11770890 · Granted Sep 26, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Radiation sensor apparatus2021
Lithographic method2021
Electron beam generation for transmission electron microscope2020
Time-of-flight charged particle spectroscopy2018
Lithographic method2017
Beam pulsing device for use in charged-particle microscopy2015