Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › MEMS resonator with co-located temperature sensor

MEMS resonator with co-located temperature sensor

US Patent 11770112 · Granted Sep 26, 2023

Estimated economic value: $32,330,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Microelectromechanical system oven-controlled oscillator2025
MEMS resonator2025
MEMS resonator2025
MEMS resonator2025
Non-lid-bonded MEMS resonator with phosphorus dopant2025
Non-lid-bonded MEMS resonator with phosphorus dopant2025
Non-lid-bonded MEMS resonator with phosphorus dopant2025
Non-lid-bonded MEMS resonator with phosphorus dopant2025
Non-lid-bonded MEMS resonator with phosphorus dopant2025
Resonant elements and oscillators2025
Resonant elements and oscillators2025
Resonant elements and oscillators2025