Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › ALD apparatus, method and valve

ALD apparatus, method and valve

US Patent 11761082 · Granted Sep 19, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

ALD apparatus, method and valve2025
Porous inlet2025
Substrate processing methods and apparatus2025
Adjustable fluid inlet assembly for a substrate processing apparatus and method2024
Coating of fluid-permeable materials2024
Spring loaded medical device2024
Sensor and its manufacturing method2024
Method and apparatus for cleaning medical instruments and for detecting residue 2023
Substrate coating2023
Manufacturing of coated items2023
Adjustable fluid inlet assembly for a substrate processing apparatus and method2022
Method for formation of patterned solder mask2022