Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Photoresist baking apparatus with cover plate having uneven exhaust hole distribution

Photoresist baking apparatus with cover plate having uneven exhaust hole distribution

US Patent 11740558 · Granted Aug 29, 2023

Estimated economic value: $8,553,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Black light-shielding photosensitive resin composition, black matrix, black ligh2025
Dual-purpose temperature measuring device2025
Lens adjustment for an edge exposure tool2025
Anti-CD96 antibodies and methods of use thereof2025
Pseudo-differential de-glitch sense amplifier2025
Anti-CD200R1 antibodies and methods of use thereof2025
Apparatus and method for detecting errors during data encryption2025
Method for fabricating semiconductor device with deposition cycles of chemical v2025
Semiconductor device pre-cleaning2025
Ammonium fluoride pre-clean protection2025
Apparatus and method for expanding round keys during data encryption2025
Apparatus and method for detecting errors during data encryption2025