Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Process kit with adjustable tuning ring for edge uniformity control

Process kit with adjustable tuning ring for edge uniformity control

US Patent 11728143 · Granted Aug 15, 2023

Estimated economic value: $42,730,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Cooling base for a substrate support2025
Lift pin assembly2025
Process kit enclosure system2024
Wafer edge ring lifting solution2024
Lift pin assembly2024
In-situ apparatus for semiconductor process module2024
Semiconductor processing with cooled electrostatic chuck2023
Cryogenic electrostatic chuck2022
Wafer edge ring lifting solution2022
Cryogenic electrostatic chuck2022
Process kit with adjustable tuning ring for edge uniformity control2021
In-situ apparatus for semiconductor process module2021