CMP composition including a novel abrasive

Assignee

• Cmc Materials

Inventors

• Alexander W. Hains (12 patents)
• Kim Marie Long (6 patents)
• Steven Grumbine (62 patents)
• Roman A. Ivanov (11 patents)
• Kevin P. Dockery (22 patents)
• Benjamin Petro (8 patents)
• Brian Sneed (1 patents)
• Galyna Krylova (1 patents)

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