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Home › Connected epitaxial optical sensing system comprising a trench deeper than a waveguide of a light source electrically isolates the light source and a detector

Connected epitaxial optical sensing system comprising a trench deeper than a waveguide of a light source electrically isolates the light source and a detector

US Patent 11713999 · Granted Aug 1, 2023

Estimated economic value: $216,194,000 ⓘ

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