Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithography apparatus and method of manufacturing article

Lithography apparatus and method of manufacturing article

US Patent 11681237 · Granted Jun 20, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Imprint method, imprint apparatus, and method of manufacturing article2025
Imprint apparatus and method of manufacturing article2024
Imprint apparatus and method of manufacturing article2022
Lithography apparatus and method of manufacturing article2021
Drawing apparatus, and method of manufacturing article2015
Load-lock apparatus, device manufacturing apparatus, and device manufacturing me2010
Stage apparatus, exposure apparatus, and device manufacturing method2008
Exposure apparatus and device manufacturing method2007
Substrate temperature adjustment apparatus for estimating a time taken until a s2003